Browse LAM RESEARCH semiconductor equipment automation modules, control boards and spare parts listed by TOPNLMS. Send exact model numbers for availability, condition, lead time and export packing checks.
TOPNLMS checks exact model numbers, available condition, compatible series notes and export lead time for LAM RESEARCH industrial automation spare parts.
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Lam Research 810-099175-011 original PCB control board for 810 Series semiconductor etch systems. Verified spare, 12-month warranty, fast global shipping.
NOVELLUS 02-268740-01 / 16-251447-00 Original Process Ring for HCM PVD300 SYS68K/SIO-2 MG2-1F-3FE systems. Genuine industrial spare, 12-month warranty, fast global shipping. Reduce downtime with certified replacement parts.
LAM RESEARCH 810-072687-523 MP8-2U NODE1 Interlock Control Module. In stock, tested, 12-month warranty. Fast shipping. Contact: [email protected]
Lam Research 810-068158-014 Node Robot Interface Board. Original industrial spare for semiconductor wafer transfer systems. 12-month warranty. Fast global shipping.
Lam Research 810-046015-010 VIOP III PCB Process I/O Control Module. Drop-in replacement & upgrade solution. Compatible wiring, protocols & rack fit. 12-month warranty. Ships from Xiamen.
Drop-in replacement for LAM RESEARCH 715-032760-106 Inner Gate Valve Drive Assembly. Compatible with Versys & Kiyo series. In stock, 12-month warranty.
Lam Research 684-013298-003 RF Generator Cable 2M replacement for 0020-32117 / 1D10-101567-12. Compatible upgrade for plasma etch systems. 12-month warranty.
Lam Research 18-22-30-A1-1613166 PCB Controller Card. Drop-in upgrade solution, compatible replacement, 12-month warranty, fast global shipping.
Lam Research DGF 810-031325-033 TA2019 IGS Motherboard — original industrial spare for semiconductor systems. Fast shipping, 12-month warranty, compatibility verified.
LAM Research 796-901039-002 IR-SENS V infrared sensor module. Original industrial spare, 14036-PE44-AGN1 compatible. Fast shipping, 12-month warranty. topnlms.com
Lam Research SI 716-082039-245 ruggedized outer gate valve assembly for etch chamber isolation. In stock, tested, 12-month warranty. Fast global shipping from TOPNLMS.
LAM RESEARCH HTAA-16W-A 5VDC 16W DC power supply module. Drop-in replacement for 853-017505-001-B, 90X0077, DM-3S12/ZN. In stock, tested, 12-month warranty.
LAM RESEARCH EP200MMC 0270-90229 / 0195-07994 original OES endpoint detector spare. Compatible EP200MMC series. Fast ship, 12-month warranty. topnlms.com
LAM RESEARCH ECM01.1-PB01-NN (OM80-HC12-V7) ruggedized backplane drive controller. In stock, tested, 12-month warranty. Fast global shipping from TOPNLMS.
LAM RESEARCH C3419 pneumatic ring 716-140139-211, N.C., 0.39–0.59 MPa. Original industrial spare for semiconductor fab systems. 12-month warranty, fast shipping.
LAM Research 853-025054-008 ruggedized DC power supply module for semiconductor etch platforms. In stock, tested, 12-month warranty. Fast global shipping.
LAM RESEARCH 853-005949-002 PLL End Point Detector PCB Module. In-stock, tested, 12-month warranty. EMI-resistant etch process control for harsh fab environments.
LAM RESEARCH 810-802799-010 IGS 16-Channel Integrated Gas System Control Board. Original spare, 12-month warranty, fast shipping. Compatible industrial replacement.
LAM Research 810-494010-001 Gas Box I/O Interlock PCB Assembly. Ruggedized safety module, EMI-hardened, 12-month warranty. In stock — fast global shipping from TOPNLMS.
LAM Research 810-234640-312 ruggedized DC power supply module for plasma etch & CVD systems. In stock, tested, 12-month warranty. Fast global shipping.
LAM RESEARCH 810-028296-174 (80157E) ruggedized Transport Arm PCB Assembly. EMI-shielded, conformal-coated, tested, 12-month warranty. In stock — TOPNLMS.
LAM RESEARCH 810-017034-005 VME CPU Processor Module. In-stock, tested, 12-month warranty. Fast global shipping. Ideal for harsh industrial environments.
Lam Research 716-230577-384 Ring Assembly. Compatible Kiyo/Flex Series replacement & upgrade. SKU 716-230577-941. In stock, 12-month warranty. Fast ship.
LAM RESEARCH 716-028028-004 Ceramic Clamp Ring C3520 27CM. Ruggedized electrode assembly for plasma etch systems. In stock, tested, 12-month warranty. Fast global shipping from TOPNLMS.
