Lam Research 716-230577-384 Ring Assembly Kiyo Replacement

Product Overview

Lam Research 716-230577-384 Ring Assembly — Seamless Kiyo/Flex Series Upgrade & Legacy System Replacement

The Lam Research 716-230577-384 Ring Assembly is a precision plasma etch chamber consumable engineered for direct drop-in replacement and upgrade within the Kiyo® and Flex® Series etch platforms. Whether you are retiring an aging chamber running legacy ring assemblies, migrating from an earlier-generation Kiyo module, or consolidating your spare-parts inventory to reduce unplanned downtime, this ring assembly provides the dimensional accuracy, material purity, and process compatibility required for high-volume semiconductor manufacturing environments.

This component is sourced, inspected, and dispatched from our Xiamen warehouse. Every unit undergoes pre-shipment dimensional verification and is packaged in cleanroom-compatible materials to preserve surface integrity during transit. Stock is maintained on-hand to support urgent replacement cycles, with standard lead times of 3–7 business days for international destinations.

Compatibility Comparison Table

Seamless Upgrade Solutions

A ring assembly replacement rarely occurs in isolation. In practice, a Kiyo or Flex chamber PM event typically involves concurrent inspection and potential swap of several adjacent consumables and support components. When planning your upgrade or migration, the following components are commonly addressed in the same service window:

The edge ring and focus ring assemblies seated adjacent to the 716-230577-384 experience comparable wear rates and should be evaluated simultaneously to avoid a second chamber vent within the same process quarter. The upper electrode assembly — including the showerhead and its associated gas distribution plate — is another high-priority item during any dielectric etch PM, as particulate contamination from a degraded showerhead can compromise the process environment even after a ring assembly swap.

For facilities running the Lam Research Kiyo 45 or Kiyo 900 configurations, the confinement ring set and liner assembly are standard co-replacement candidates. These components define the plasma confinement geometry and directly influence etch uniformity; replacing the ring assembly without inspecting the liner can result in asymmetric etch profiles post-PM.

On the process support side, the ESC (electrostatic chuck) assembly and its backside helium supply fittings should be leak-checked whenever the chamber is vented for ring replacement. Similarly, the RF match network and associated RF transmission line connectors benefit from inspection during the same downtime window to confirm impedance stability after reassembly.

For facilities managing a broader Lam Research installed base — including Versys® Metal or 2300® Syndion® platforms — maintaining a consolidated spare-parts inventory that includes the 716-230577-384 alongside compatible ring assemblies for those platforms reduces procurement lead time and simplifies your MRO (maintenance, repair, and operations) workflow. Our team can assist with cross-platform BOM alignment on request.

Retrofit Guidance FAQ

Q: Can the 716-230577-384 replace the 716-230577-941 without process recipe changes?
A: Yes. The 716-230577-384 is dimensionally and materially equivalent to the 716-230577-941 for standard Kiyo/Flex chamber configurations. No recipe offset or RF tuning adjustment is required following installation, provided the chamber is properly seasoned per Lam’s standard PM procedure.

Q: What is the installation procedure for this ring assembly?
A: Installation follows the standard Lam Research chamber vent and PM sequence. The chamber must be vented to atmosphere, the existing ring assembly removed using the OEM torque sequence, and the replacement seated and torqued to specification. No special tooling beyond the standard Lam PM kit is required. Refer to your platform-specific PM manual for torque values and seasoning recipe.

Q: Is this part compatible with both 300 mm and 200 mm wafer configurations?
A: The 716-230577-384 is designed for the 300 mm Kiyo/Flex platform. If your facility operates 200 mm legacy chambers, please contact us with your full chamber model number to confirm the correct ring assembly SKU for your configuration.

Q: How does this part affect plasma confinement and etch uniformity?
A: A new ring assembly restores the designed plasma confinement geometry, which directly impacts etch rate uniformity across the wafer. Worn or cracked ring assemblies are a leading cause of edge-to-center non-uniformity in dielectric etch processes. Replacing with a dimensionally accurate unit typically restores within-wafer uniformity to baseline specification.

Q: What physical space and clearance requirements apply?
A: The 716-230577-384 is a direct dimensional match for the Kiyo/Flex ring seat. No chamber modification, bracket adaptation, or additional clearance is required. The part ships in cleanroom packaging and should be handled in a cleanroom or clean-bench environment prior to installation.

Q: Can you support urgent or emergency procurement?
A: Yes. We maintain on-hand stock specifically to support unplanned downtime events. Contact us at [email protected] or +86 18359293191 to confirm availability and arrange priority dispatch.

Warranty Assurance

Every Lam Research 716-230577-384 Ring Assembly shipped by TOPNLMS is covered by a 12-month warranty from the confirmed shipment date. Our warranty program is designed to give procurement engineers and fab maintenance teams the confidence to commit to replacement inventory without exposure to hidden quality risk.

Pre-shipment inspection: Each unit is dimensionally verified and visually inspected for surface defects, chips, or contamination before packaging. Units that do not meet our acceptance criteria are quarantined and not dispatched.

Cleanroom-compatible packaging: Parts are packaged in double-sealed, anti-static, cleanroom-grade bags with desiccant inserts to prevent moisture ingress during international transit.

Replacement support: In the event of a confirmed defect within the warranty period, we will arrange priority replacement shipment at no additional cost. Our team will work with your procurement or engineering contact to expedite the replacement and minimize any secondary downtime impact.

After-sales response: Our technical and logistics team responds to warranty and post-shipment inquiries within 24 business hours. For urgent cases, same-day response is available via direct contact.

Procurement assurance: We issue a commercial invoice, packing list, and certificate of conformance with every shipment to support your incoming inspection and ERP receiving process. Export documentation for customs clearance is prepared in accordance with destination country requirements.