Lam Research 713-028487-001 Confinement Ring Replacement

Product Overview

Lam Research 713-028487-001 Confinement Ring: Seamless CCP/ICP Etch Chamber Upgrade & Replacement

The Lam Research 713-028487-001 plasma confinement ring is a critical consumable component used in capacitively coupled plasma (CCP) and inductively coupled plasma (ICP) etch chambers across Lam Research’s Versys, Exelan, and 2300 series platforms. As semiconductor fabs push toward tighter process nodes and higher throughput, maintaining plasma uniformity through timely confinement ring replacement is essential to yield stability and chamber-to-chamber matching.

This listing covers the 713-028487-001 confinement ring, also cross-referenced under part numbers 0020-35057 and 100-132-135. Whether you are executing a scheduled preventive maintenance cycle, responding to an unplanned chamber excursion, or migrating from an end-of-life chamber configuration, this drop-in replacement is sourced to OEM dimensional and material specifications.

Compatibility Comparison Table

Seamless Upgrade Solutions

A confinement ring replacement rarely occurs in isolation. During a planned chamber wet clean or preventive maintenance window, engineering teams typically address the full consumable stack to restore chamber baseline and extend mean time between cleans (MTBC). When replacing the 713-028487-001 confinement ring, the following components are commonly serviced in the same maintenance cycle on Lam Research CCP/ICP platforms:

The upper electrode assembly and showerhead — often referenced under Lam Research’s Exelan and Versys platform part families — are inspected for erosion and replaced alongside the confinement ring to restore plasma distribution symmetry. The focus ring (also called the edge ring or silicon ring on some configurations) sits concentrically with the confinement ring and directly affects etch uniformity at the wafer edge; its replacement is typically triggered at the same PM interval.

The chamber liner and process kit shield protect the chamber body from reactive plasma species and are evaluated for deposition buildup or cracking during the same disassembly. On dual-frequency systems, the lower electrode (ESC — electrostatic chuck) surface condition is also verified, as confinement ring wear often correlates with ESC edge erosion patterns.

For facilities managing multiple chamber types, the Lam Research 2300 Kiyo and Flex series platforms share a similar consumable replacement philosophy, and cross-platform PM scheduling can reduce total downtime. The RF match network components — including match capacitors and RF cables — are also checked during extended PM windows, as impedance drift can accelerate consumable wear.

Finally, the gas distribution plate and backing plate assembly are inspected for particle generation risk. Facilities running high-volume production on Lam Research etch tools often maintain a spare process kit — including a pre-qualified confinement ring — to enable rapid chamber swap-out and minimize unplanned downtime exposure.

Retrofit Guidance FAQ

Q: Is the 713-028487-001 a direct drop-in replacement for 0020-35057 and 100-132-135?
A: Yes. All three part numbers reference the same confinement ring geometry and material specification. No mechanical modification to the chamber body or mounting hardware is required. Standard torque specifications per the Lam Research chamber maintenance manual apply.

Q: Will replacing the confinement ring require a chamber re-qualification or recipe adjustment?
A: In most cases, a direct OEM-equivalent replacement does not require recipe modification. However, standard practice calls for a short seasoning run (typically 5–10 wafer equivalents) followed by a process qualification wafer to confirm etch rate, uniformity, and CD targets are within spec before returning the chamber to production.

Q: What etch chemistries is this confinement ring rated for?
A: The 713-028487-001 is designed for use with standard dielectric and conductor etch chemistries including Cl₂, HBr, CF₄, NF₃, SF₆, and O₂-based processes. It is not rated for fluorine-rich high-power processes beyond OEM chamber specifications.

Q: How do I verify the correct installation orientation?
A: The confinement ring is keyed or indexed to the chamber body via alignment features. Refer to the Lam Research chamber maintenance procedure for your specific platform (Versys, Exelan, or 2300 series). Incorrect orientation will be immediately apparent during assembly and will prevent proper seating.

Q: What is the recommended replacement interval?
A: Replacement interval depends on process chemistry aggressiveness, RF power levels, and chamber utilization. OEM guidelines typically recommend inspection every 250–500 RF hours and replacement when dimensional wear exceeds the specified tolerance band. High-volume production fabs often replace on a fixed PM schedule regardless of measured wear to eliminate variability.

Q: Can this part be shipped internationally?
A: Yes. TOPNLMS ships from Xiamen, China to global destinations. Export documentation, commercial invoice, and packing list are provided. Customers are responsible for import duties and customs clearance in their jurisdiction. Contact [email protected] for freight options and lead time confirmation.

Warranty Assurance

Every 713-028487-001 confinement ring shipped by TOPNLMS is covered by a 12-month warranty from the date of shipment. Prior to dispatch, each unit undergoes dimensional inspection and visual quality verification to confirm it meets OEM-equivalent specifications for geometry, surface finish, and material integrity.

In the event of a confirmed manufacturing defect or dimensional non-conformance identified upon receipt, TOPNLMS will arrange a replacement shipment or issue a credit at our discretion. Warranty claims must be submitted within the 12-month coverage period with photographic documentation of the defect and the original order reference.

Our after-sales response target is 24–48 business hours for initial acknowledgment of warranty inquiries. For urgent production-impacting situations, please flag your inquiry as priority when contacting our team.

TOPNLMS maintains inventory of high-demand Lam Research consumables to support rapid fulfillment. Standard in-stock orders ship within 3–5 business days from our Xiamen warehouse. Expedited shipping options are available upon request.

For procurement teams requiring documentation, we can provide a product datasheet, inspection report, and commercial invoice upon request prior to order placement.

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