NOVELLUS 17-307113-00 PVD300 Shield Pedestal Upgrade Solution

Product Overview

NOVELLUS 17-307113-00 PVD300 Shield Pedestal Upgrade Solution: Seamless Transition & Legacy System Compatibility

When your NOVELLUS PVD300 platform faces an unplanned shutdown due to a worn or end-of-life Shield Pedestal, every hour of downtime translates directly into lost wafer throughput and escalating production costs. The NOVELLUS 17-307113-00 / 2301407-B / SM2315D-BRK / 02-306362-00 PVD300 Shield Pedestal AL Grit CU offered by TOPNLMS is a precision-matched replacement component engineered to restore your deposition chamber to full operational specification with minimal intervention and zero re-qualification overhead.

This Shield Pedestal is manufactured to the original NOVELLUS dimensional and material specification: aluminum substrate with grit-blasted surface finish optimized for copper (CU) PVD process environments. The AL Grit surface treatment ensures consistent particle adhesion characteristics, matching the film-build behavior of the OEM part across extended process cycles. Whether you are operating a legacy NOVELLUS PVD300 tool or a Lam Research-rebranded successor platform, this component integrates without modification to the existing pedestal assembly, lift-pin mechanism, or edge-ring seating geometry.

Facilities managing multi-chamber PVD clusters — including configurations pairing the PVD300 with NOVELLUS VECTOR or Sequel platforms — will find this replacement particularly valuable for maintaining cross-chamber process uniformity. The pedestal’s grit profile is calibrated to match the deposition rate and film stress targets established during your original process of record (POR), reducing the risk of post-swap re-characterization runs that consume productive tool time.

For fabs transitioning from older NOVELLUS M2000 or Concept One PVD platforms to the PVD300 architecture, this Shield Pedestal serves as a critical bridging component. The upgrade path from M2000-era process kits to PVD300-compatible assemblies typically involves replacing the shield body (part reference SM2315D-BRK), the pedestal base plate (02-306362-00), and the retaining ring assembly (2301407-B) as a coordinated kit. TOPNLMS stocks these cross-referenced part numbers as a matched set, enabling a single-source procurement approach that eliminates the lead-time risk of sourcing individual components from multiple suppliers.

Installation is straightforward for qualified process engineers familiar with PVD300 chamber maintenance procedures. The pedestal mounts to the standard lift-pin carriage using the original bolt pattern and torque specification. No modifications to the chamber body, RF match network, or ESC (electrostatic chuck) power feed-through are required. The AL Grit surface is pre-conditioned and ready for seasoning runs immediately upon installation, reducing the number of conditioning wafers needed before returning the chamber to production.

From a supply chain perspective, TOPNLMS maintains ready-to-ship inventory of the 17-307113-00 assembly, with export documentation prepared for both domestic CN dispatch and international air freight to semiconductor fabs in Taiwan, South Korea, Malaysia, Singapore, and the United States. Standard lead time from order confirmation to dispatch is 1–3 business days. All units undergo dimensional inspection and surface condition verification prior to packaging. Each shipment includes a certificate of conformance and is covered by a 12-month warranty against manufacturing defects.

Compatibility Comparison Table

Seamless Upgrade Solutions

A successful PVD300 chamber restoration rarely involves a single component. Process engineers performing a scheduled PM or responding to an unplanned chamber event will typically evaluate the condition of several interdependent consumables and structural parts simultaneously. When replacing the Shield Pedestal (17-307113-00), it is standard practice to inspect and often co-replace the PVD300 Shield Body and Dark Space Shield assemblies, as these components share the same deposition cycle count and exhibit correlated wear patterns in copper process environments.

The PVD300 Edge Ring and Cover Ring assemblies seat directly against the pedestal surface and should be evaluated for dimensional conformance whenever the pedestal is removed. Worn edge rings can introduce asymmetric film thickness profiles that are difficult to diagnose without first ruling out pedestal-related geometry changes. Similarly, the PVD300 Clamp Ring mechanism interacts with the pedestal’s upper face and should be inspected for deformation or particle contamination during the same maintenance window.

For facilities upgrading from older NOVELLUS M2000 or Concept One process kits, the transition to PVD300-compatible consumables also typically involves updating the Target Backing Plate assembly and the Magnetron Assembly configuration to match the PVD300 chamber geometry. The PVD300 Liner and Adapter Ring components are also commonly replaced as part of a full chamber refurbishment kit, ensuring that the restored chamber meets the original film uniformity and particle performance specifications.

TOPNLMS maintains cross-referenced inventory for the full range of PVD300 process kit consumables, enabling customers to consolidate their replacement procurement into a single purchase order. This approach reduces administrative overhead, simplifies incoming inspection, and ensures that all replaced components carry the same 12-month warranty start date — a significant advantage for fabs managing multi-chamber tool fleets with staggered PM schedules.

Retrofit Guidance FAQ

Q: Can the 17-307113-00 Shield Pedestal be installed without modifying the existing PVD300 chamber body?
A: Yes. This replacement uses the identical bolt pattern, lift-pin carriage interface, and edge-ring seating geometry as the OEM part. No machining, shimming, or chamber body modification is required.

Q: Is this pedestal compatible with both CU and barrier/seed PVD process configurations on the PVD300?
A: The AL Grit CU designation indicates this pedestal is optimized for copper PVD process environments. For barrier or seed layer applications using different target materials, please confirm the process-specific pedestal specification with your process engineer before ordering.

Q: How many seasoning wafers are required after installation?
A: The pre-conditioned AL Grit surface reduces the number of conditioning wafers compared to a raw aluminum pedestal. Actual seasoning protocol depends on your fab’s POR; however, customers typically report a 30–50% reduction in seasoning run count versus non-pre-conditioned alternatives.

Q: Does replacing the Shield Pedestal require re-qualification of the chamber’s film thickness uniformity?
A: A full re-qualification is at the discretion of your process engineering team. Because this replacement matches the OEM dimensional and surface specification, many facilities perform a reduced qualification protocol (typically 3–5 monitor wafers) rather than a full POR re-qualification.

Q: What documentation is included with the shipment?
A: Each unit ships with a certificate of conformance, dimensional inspection report, and commercial invoice with HS code classification for customs clearance. Export documentation for international shipments is prepared in advance to minimize customs processing delays.

Q: Can TOPNLMS supply the full PVD300 process kit (Shield Body, Edge Ring, Cover Ring, Clamp Ring, and Pedestal) as a matched set?
A: Yes. Contact us at [email protected] or +86 18359293191 to request a kit quotation. Matched-set procurement ensures all components carry the same warranty start date and simplifies incoming inspection.

Warranty Assurance

Every NOVELLUS 17-307113-00 / 2301407-B / SM2315D-BRK / 02-306362-00 PVD300 Shield Pedestal AL Grit CU shipped by TOPNLMS is covered by a 12-month warranty from the date of delivery. This warranty covers manufacturing defects, dimensional non-conformance, and surface finish deviations from the stated specification.

Prior to dispatch, each unit undergoes a structured outgoing inspection protocol that includes dimensional verification of the pedestal OD, ID, and height stack; surface condition assessment of the AL Grit finish; and visual inspection for handling damage, contamination, or packaging integrity. Units that do not pass inspection are quarantined and not shipped.

In the event of a warranty claim, TOPNLMS provides a replacement unit dispatch within 5 business days of claim confirmation. Customers are not required to return the defective unit before the replacement is dispatched for critical production situations — contact our team to discuss expedited replacement arrangements. Our after-sales response team is reachable at [email protected] or +86 18359293191 during business hours (CST, Monday–Saturday).

For procurement teams requiring formal warranty documentation for vendor qualification purposes, TOPNLMS can provide a signed warranty letter on company letterhead upon request. We support NET payment terms for qualified institutional buyers and accept T/T bank transfer, PayPal, and major trade finance instruments.