Product Overview
Agilent 5517DC30 Ruggedized HeNe Laser Head for Harsh Environments
The Agilent 5517DC30 (P/N 4022.456.48221) is a two-frequency helium-neon (HeNe) laser head engineered for precision displacement and position measurement in demanding industrial and semiconductor manufacturing environments. As a core component of the Keysight / Agilent 5517 laser interferometer series, this module delivers exceptional frequency stability, long coherence length, and reliable output power — even under conditions of mechanical vibration, thermal cycling, and electromagnetic interference common to production floors, metrology labs, and precision machining centers.
Designed to operate continuously in environments where standard optical components would fail, the 5517DC30 maintains its two-frequency Zeeman-split output with tight frequency separation tolerances, ensuring that downstream interferometer electronics — including the Agilent 10885A PC axis board, 10887A laser measurement system, and N1231B three-axis board — receive a clean, stable signal for sub-nanometer resolution measurement. Whether integrated into a wafer stepper, coordinate measuring machine (CMM), or precision stage controller, this laser head provides the measurement backbone that critical infrastructure depends on.
Rugged Specifications Table
| Parameter |
Specification |
| Model |
Agilent / Keysight 5517DC30 |
| Part Numbers |
4022.456.48221 / 4022.454.71615 / 4022.454.71616 / 5517D-C19 |
| Laser Type |
Two-Frequency Zeeman-Split HeNe (Helium-Neon) |
| Wavelength |
632.991 nm (vacuum) |
| Output Power |
≥ 0.2 mW (typical) |
| Frequency Split |
~2 MHz (Zeeman-split, dual polarization) |
| Frequency Stability |
± 0.02 ppm (after warm-up) |
| Operating Temperature |
10 °C to 40 °C |
| Storage Temperature |
-40 °C to +70 °C |
| Warm-Up Time |
≤ 20 minutes to rated stability |
| EMI Resistance |
Designed for industrial EMI environments per CE/FCC guidelines |
| Vibration Tolerance |
Ruggedized housing; compatible with anti-vibration stage mounts |
| Power Supply |
Via Agilent 5517 laser power supply / controller unit |
| Connector Interface |
Standard Agilent 5517 series multi-pin connector |
| Compatible Systems |
Agilent/Keysight 5508A, 5530, 10885A, 10887A, N1231B, E1826A |
| Application Sectors |
Semiconductor lithography, CMM, precision machining, R&D metrology |
| Condition |
Genuine OEM, tested, fully functional |
| Warranty |
12-Month Quality Warranty |
Comprehensive Protection Solutions
The 5517DC30 laser head does not operate in isolation — it is the optical heart of a tightly integrated measurement system. In semiconductor fabs and precision manufacturing lines, it works in concert with the Agilent 10887A laser measurement system and 10885A PC axis board to deliver real-time position feedback to motion controllers. The laser signal is routed through Agilent 10702A linear interferometers and 10703A beam benders, with 10704A retroreflectors completing the optical path for multi-axis stage measurement.
For environments with elevated vibration — such as heavy press lines or milling centers — the 5517DC30 is typically mounted using Agilent 5517 series laser mounts and kinematic bases, which isolate the laser tube from structural vibration while maintaining precise beam alignment. In cleanroom semiconductor applications, the system pairs with Agilent E1826A fiber-optic interferometer receivers to extend measurement reach without compromising signal integrity.
Where electromagnetic interference is a concern — particularly in facilities running high-power servo drives, variable frequency drives (VFDs), or large transformer banks — the shielded cable assemblies and differential signal outputs of the 5517 system architecture provide robust noise rejection. The Agilent N1231B three-axis PCI board and 10885A axis board further condition and digitize the interferometer signal, ensuring that even in electrically noisy industrial environments, position data remains accurate to nanometer resolution. Replacement laser heads such as the 5517D-C19 (P/N 4022.454.71615 / 4022.454.71616) are direct functional equivalents and serve as critical spare parts for minimizing downtime on production-critical equipment.
Application in Critical Infrastructure
The Agilent 5517DC30 is deployed across the most demanding sectors of global industry. In semiconductor wafer fabrication, it provides the sub-nanometer position feedback required by photolithography steppers and scanners, where overlay accuracy directly determines chip yield. In precision aerospace and defense manufacturing, it enables the tight dimensional tolerances required for turbine blade profiling, optical bench assembly, and inertial navigation component fabrication.
In metrology laboratories and national standards institutes, the 5517DC30 serves as a primary length standard reference, calibrating CMMs, gauge blocks, and linear encoders. In flat panel display (FPD) manufacturing, it guides the large-format stages used in glass substrate patterning, where stage travel exceeds one meter but positional accuracy must remain within tens of nanometers. In advanced materials research — including nanotechnology, MEMS fabrication, and photonics — the laser head underpins the precision motion systems that make sub-micron feature creation possible.
For facilities operating continuous production lines where unplanned downtime carries significant financial and safety consequences, maintaining a qualified spare 5517DC30 unit on-site is a recognized best practice. Our in-stock inventory, pre-shipment functional testing, and 12-month warranty make TOPNLMS a reliable source for both immediate replacement and planned maintenance programs.
Security & Quality FAQ
Q1: What does the 12-month warranty cover?
All 5517DC30 units supplied by TOPNLMS carry a 12-month warranty covering functional performance, frequency stability, and output power to OEM specifications. Units that fail to meet rated parameters within the warranty period are repaired or replaced at no charge. Warranty claims are processed with direct technical support from our engineering team.
Q2: How is each unit tested before shipment?
Every 5517DC30 laser head undergoes pre-shipment functional verification including laser output power measurement, frequency stability check after warm-up, and connector integrity inspection. Units are shipped in anti-static, shock-protected packaging with a test record. We do not ship untested or cosmetically refurbished units without disclosure.
Q3: Is the 5517DC30 compatible with my existing Agilent/Keysight interferometer system?
Yes. The 5517DC30 is a direct OEM replacement for systems built around the Agilent 5517 laser series, including configurations using the 10885A, 10887A, N1231B, and E1826A receiver boards. It is also cross-compatible with part numbers 4022.454.71615, 4022.454.71616, and 5517D-C19. If you are unsure of compatibility with your specific system configuration, contact our technical team with your system model number for confirmation before ordering.
Q4: Can TOPNLMS support long-term or repeat supply requirements?
Yes. TOPNLMS maintains ongoing inventory of the 5517DC30 and related Agilent laser interferometer components to support both emergency replacement and planned maintenance schedules. We offer priority allocation for customers with recurring procurement needs, and our team can advise on equivalent or upgraded replacement options as OEM availability evolves. Contact us to discuss volume pricing or consignment stock arrangements.